Square diaphragm CMUT capacitance calculation using a new deflection shape function
This article was published in the Journal of Sensors [© 2011 Md Mosaddequr Rahman and Sazzadur Chowdhury.] and the definite version is available at: http://doi.org/10.1155/2011/581910 The Article's website is at: https://www.hindawi.com/journals/js/2011/581910/
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© 2011 Hindawi Publishing Corporation
2016
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| 在线阅读: | http://hdl.handle.net/10361/7237 http://doi.org/10.1155/2011/581910 |
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10361-72372016-12-14T09:50:50Z Square diaphragm CMUT capacitance calculation using a new deflection shape function Rahman, Md. Mosaddequr Chowdhury, Sazzadur Tanvir Ur Rahman Department of Electrical and Electronic Engineering, BRAC University This article was published in the Journal of Sensors [© 2011 Md Mosaddequr Rahman and Sazzadur Chowdhury.] and the definite version is available at: http://doi.org/10.1155/2011/581910 The Article's website is at: https://www.hindawi.com/journals/js/2011/581910/ A new highly accurate closed-form capacitance calculation model has been developed to calculate the capacitance of capacitive micromachined ultrasonic transducers (CMUTs) built with square diaphragms. The model has been developed by using a two-dimensional polynomial function that more accurately predicts the deflection curve of a square diaphragm deformed under the influence of a uniform external pressure and also takes account of the fringing field capacitances. The model has been verified by comparing the model-predicted deflection profiles and capacitance values with experimental results published elsewhere and finite element analysis (FEA) carried out by the authors for different material properties, geometric specifications, and loading conditions. New model-calculated capacitance values are found to be in excellent agreement with published experimental results with a maximum deviation of 1.7, and a maximum deviation of 1.5 has been observed when compared with FEA results. The model can help in improving the accuracy of the design methodology of CMUT devices and other MEMS-based capacitive type sensors built with square diaphragms. Published 2016-12-14T09:49:29Z 2016-12-14T09:49:29Z 2011 Article Rahman, M. M., & Chowdhury, S. (2011). Square diaphragm CMUT capacitance calculation using a new deflection shape function. Journal of Sensors, 2011 doi:10.1155/2011/581910 1687725X http://hdl.handle.net/10361/7237 http://doi.org/10.1155/2011/581910 en https://www.hindawi.com/journals/js/2011/581910/ © 2011 Hindawi Publishing Corporation |
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Brac University |
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Institutional Repository |
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English |
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This article was published in the Journal of Sensors [© 2011 Md Mosaddequr Rahman and Sazzadur Chowdhury.] and the definite version is available at: http://doi.org/10.1155/2011/581910 The Article's website is at: https://www.hindawi.com/journals/js/2011/581910/ |
| author2 |
Department of Electrical and Electronic Engineering, BRAC University |
| author_facet |
Department of Electrical and Electronic Engineering, BRAC University Rahman, Md. Mosaddequr Chowdhury, Sazzadur Tanvir Ur Rahman |
| format |
Article |
| author |
Rahman, Md. Mosaddequr Chowdhury, Sazzadur Tanvir Ur Rahman |
| spellingShingle |
Rahman, Md. Mosaddequr Chowdhury, Sazzadur Tanvir Ur Rahman Square diaphragm CMUT capacitance calculation using a new deflection shape function |
| author_sort |
Rahman, Md. Mosaddequr |
| title |
Square diaphragm CMUT capacitance calculation using a new deflection shape function |
| title_short |
Square diaphragm CMUT capacitance calculation using a new deflection shape function |
| title_full |
Square diaphragm CMUT capacitance calculation using a new deflection shape function |
| title_fullStr |
Square diaphragm CMUT capacitance calculation using a new deflection shape function |
| title_full_unstemmed |
Square diaphragm CMUT capacitance calculation using a new deflection shape function |
| title_sort |
square diaphragm cmut capacitance calculation using a new deflection shape function |
| publisher |
© 2011 Hindawi Publishing Corporation |
| publishDate |
2016 |
| url |
http://hdl.handle.net/10361/7237 http://doi.org/10.1155/2011/581910 |
| work_keys_str_mv |
AT rahmanmdmosaddequr squarediaphragmcmutcapacitancecalculationusinganewdeflectionshapefunction AT chowdhurysazzadurtanvirurrahman squarediaphragmcmutcapacitancecalculationusinganewdeflectionshapefunction |
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