An improved analytical method to design CMUTs with square diaphragms

An improved analytical method to design CMUTs with square diaphragms

This article was published in the IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control [© 1986-2012 IEEE.] and the definite version is available at: http://doi.org/10.1109/TUFFC.2013.2632 The Article's website is at: http://ieeexplore.ieee.org/document/6489818/

Detalhes bibliográficos
Principais autores: Rahman, Dr. Md. Mosaddequr, Hernandez, Jonathan A Reynoso, Chowdhury, Sazzadur Tanvir Ur Rahman
Outros Autores: Department of Electrical and Electronic Engineering
Formato: Atigo
Idioma:English
Publicado em: © 1986-2012 Institute of Electrical and Electronics Engineers Inc. 2016
Acesso em linha:http://hdl.handle.net/10361/7045
id 10361-7045
record_format dspace
spelling 10361-70452016-11-30T09:02:50Z An improved analytical method to design CMUTs with square diaphragms Rahman, Dr. Md. Mosaddequr Hernandez, Jonathan A Reynoso Chowdhury, Sazzadur Tanvir Ur Rahman Department of Electrical and Electronic Engineering This article was published in the IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control [© 1986-2012 IEEE.] and the definite version is available at: http://doi.org/10.1109/TUFFC.2013.2632 The Article's website is at: http://ieeexplore.ieee.org/document/6489818/ A highly accurate mathematical method has been presented for analytical characterization of capacitive micromachined ultrasonic transducers (CMUTs) built with square diaphragms. The method uses a new two-dimensional polynomial function to more accurately predict the deflection curve of a multilayer square diaphragm subject to both mechanical and electrostatic pressure and a new capacitance model that takes into account the contribution of the fringing field capacitances. Both of the models have been experimentally verified by comparing the models predicted values with measurement results and are found to be in excellent agreement with a maximum deviation of less than 2% for experimentally measured capacitance values. 3-D electromechanical finite element analysis (FEA) for a wide range of material properties, geometric specifications, and loading conditions show that the presented method is highly consistent in accuracy over the typical square-diaphragm CMUT design space. Published 2016-11-30T08:59:17Z 2016-11-30T08:59:17Z 2013 Article Rahman, M., Hernandez, J., & Chowdhury, S. (2013). An improved analytical method to design CMUTs with square diaphragms. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 60(4), 834-845. doi:10.1109/TUFFC.2013.2632 08853010 http://hdl.handle.net/10361/7045 10.1109/TUFFC.2013.2632 en http://ieeexplore.ieee.org/document/6489818/ © 1986-2012 Institute of Electrical and Electronics Engineers Inc.
institution Brac University
collection Institutional Repository
language English
description This article was published in the IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control [© 1986-2012 IEEE.] and the definite version is available at: http://doi.org/10.1109/TUFFC.2013.2632 The Article's website is at: http://ieeexplore.ieee.org/document/6489818/
author2 Department of Electrical and Electronic Engineering
author_facet Department of Electrical and Electronic Engineering
Rahman, Dr. Md. Mosaddequr
Hernandez, Jonathan A Reynoso
Chowdhury, Sazzadur Tanvir Ur Rahman
format Article
author Rahman, Dr. Md. Mosaddequr
Hernandez, Jonathan A Reynoso
Chowdhury, Sazzadur Tanvir Ur Rahman
spellingShingle Rahman, Dr. Md. Mosaddequr
Hernandez, Jonathan A Reynoso
Chowdhury, Sazzadur Tanvir Ur Rahman
An improved analytical method to design CMUTs with square diaphragms
author_sort Rahman, Dr. Md. Mosaddequr
title An improved analytical method to design CMUTs with square diaphragms
title_short An improved analytical method to design CMUTs with square diaphragms
title_full An improved analytical method to design CMUTs with square diaphragms
title_fullStr An improved analytical method to design CMUTs with square diaphragms
title_full_unstemmed An improved analytical method to design CMUTs with square diaphragms
title_sort improved analytical method to design cmuts with square diaphragms
publisher © 1986-2012 Institute of Electrical and Electronics Engineers Inc.
publishDate 2016
url http://hdl.handle.net/10361/7045
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