APA aipamena

Watanabe, H. Photomask and Next-Generation Lithography Mask Technology XIV. SPIE Digital Library.

Chicago Style aipamena

Watanabe, Hidehiro. Photomask and Next-Generation Lithography Mask Technology XIV. SPIE Digital Library.

MLA aipamena

Watanabe, Hidehiro. Photomask and Next-Generation Lithography Mask Technology XIV. SPIE Digital Library.

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