APA (7th ed.) Citation

Levinson, H. J. Principles of Lithography, 3rd Ed. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Levinson, Harry J. Principles of Lithography, 3rd Ed. SPIE Digital Library.

MLA (8th ed.) Citation

Levinson, Harry J. Principles of Lithography, 3rd Ed. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.