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00874cam a2200181 a 4500 |
| 001 |
AALConferenceProceedingsResearch4Life(SPIE)005233 |
| 008 |
240908c9999 xx r poo 0 0eng d |
| 020 |
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|a 9780892526000
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| 040 |
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|a BD-DhAAL
|c BD-DhAAL
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| 245 |
0 |
0 |
|h [electronic resource]
|a Micron and Submicron Integrated Circuit Metrology
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| 260 |
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1 |
|b SPIE Digital Library,
|c 1/2/86
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| 300 |
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|a 1 online resource
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| 500 |
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|a <strong>On-Campus Access Only (IP based access)</strong>
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| 506 |
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|a Electronic access restricted to authorized BRAC University faculty, staff and students
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| 538 |
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|a Mode of access: Internet
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| 655 |
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7 |
|a Conference papers and proceedings.
|2 Library of Congress
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| 700 |
1 |
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|a Monahan, Kevin
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| 856 |
4 |
0 |
|z Full text available on Research4Life (SPIE Digital Library)
|u https://login.research4life.org/tacsgr1www_spiedigitallibrary_org/conference-proceedings-of-spie/0565
|