Stover, H. Optical Microlithography II: Technology for the 1980s. SPIE Digital Library.
Citación estilo ChicagoStover, Harry. Optical Microlithography II: Technology for the 1980s. SPIE Digital Library.
Cita MLAStover, Harry. Optical Microlithography II: Technology for the 1980s. SPIE Digital Library.
Warning: These citations may not always be 100% accurate.