Dey, J. Developments in Semiconductor Microlithography V. SPIE Digital Library.
Citazione stile Chigago Style (17a edizione)Dey, James. Developments in Semiconductor Microlithography V. SPIE Digital Library.
Citatione MLA (8a ed.)Dey, James. Developments in Semiconductor Microlithography V. SPIE Digital Library.
Attenzione: Queste citazioni potrebbero non essere precise al 100%.