Dey, J. Developments in Semiconductor Microlithography IV. SPIE Digital Library.
Cita Chicago (17th ed.)Dey, James. Developments in Semiconductor Microlithography IV. SPIE Digital Library.
Cita MLA (8th ed.)Dey, James. Developments in Semiconductor Microlithography IV. SPIE Digital Library.
Atenció: Aquestes cites poden no estar 100% correctes.