Chen, F. Microelectronics Technology and Process Integration. SPIE Digital Library.
Citazione stile Chigago Style (17a edizione)Chen, Fusen. Microelectronics Technology and Process Integration. SPIE Digital Library.
Citatione MLA (8a ed.)Chen, Fusen. Microelectronics Technology and Process Integration. SPIE Digital Library.
Attenzione: Queste citazioni potrebbero non essere precise al 100%.