Cita APA (7a ed.)

Wiley, J. 10th Annual Symp on Microlithography. SPIE Digital Library.

Cita Chicago Style (17a ed.)

Wiley, Jim. 10th Annual Symp on Microlithography. SPIE Digital Library.

Cita MLA (8a ed.)

Wiley, Jim. 10th Annual Symp on Microlithography. SPIE Digital Library.

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